The bounce resonance heating of low-energy electrons in capacitively coupled discharges

Journal of Physics D: Applied Physics

Volumn 41, Issue 2, 2008, Pages

  Park, G Y ^a   Lee, J K ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON RESONANCE; MAGNETIC FIELD EFFECTS; MOLECULAR INTERACTIONS; PLASMA HEATING;

BOUNCE RESONANCE HEATING; CAPACITIVELY COUPLED DISCHARGES; ELECTROSTATIC POTENTIAL; RESONANT HEATING;

MOLECULAR DYNAMICS;

EID: 38049077405     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/2/022004     Document Type: Article

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