Plasma diagnostics by laser spectroscopic electric field measurement

Pure and Applied Chemistry

Volumn 77, Issue 2, 2005, Pages 345-358

  Czarnetzki, U ^a   Luggenholscher D ^a   Kadetov, V A ^a   Dobele H F ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Electrical field measurement; Laser spectroscopy; Microwave discharges; Plasma diagnostics; Plasma sheaths; RF discharges

Indexed keywords

CONFERENCE PAPER; DENSITY; ELECTRIC FIELD; ELECTRIC POTENTIAL; ELECTRODE; FLUORESCENCE; LASER; MEASUREMENT; MICROWAVE RADIATION; SPECTROSCOPY; TECHNIQUE;

EID: 15244353251     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200577020345     Document Type: Conference Paper

References (26)

1. R. Piejak, V. Godyak, B. Alexandrovich. Rev. Sci. Instrum. 72, 4002 (2001).
2. F. F. Chen. In Gaseous Electronics, Vol. 1, M. N. Hirsch and H. J. Oskam (Eds.), Academic Press, New York (1978).
3. T. Lho, N. Hershkowitz, G. H. Kim. Rev. Sci. Instrum. 71, 403 (2000).
4. R. A. Gottscho. Phys. Rev. A 36, 2233 (1987).
5. B. N. Ganguly. J. Appl. Phys. 60, 571 (1986).
6. E. A. Den Hartog, D. A. Doughty, J. E. Lawler. Phys. Rev. A 38, 2471 (1988).
7. M. P. Alberta, H. Debontride, J. Derouard, N. Sadeghi. J. Phys. III (France) 3, 105 (1993).
8. J. E. Lawler and D. A. Doughty. Adv. Atom. Mol. Opt. Phys. 34, 171 (1994).
9. G. A. Hebner, K. Greenberg, M. E. Riley. J. Appl. Phys. 76, 4036 (1994).
10. J. P. Booth, M. Fadlallah, J. Derouard, N. Sadeghi. Appl. Phys. Lett. 65, 819 (1994).
11. S. Maurmann, V. P. Gavrilenko, H. J. Kunze, E. Oks. J. Phys. D: Appl. Phys. 29, 1525 (1996).
12. U. Czarnetzki, D. Luggenhölscher, H. F. Döbele. Phys. Rev. Lett. 81 (21), 4592 (1998).
13. J. B. Kim, K. Kawamura, Y. W. Choi, M. D. Bowden, K. Muraoka, V. Helbig. IEEE Trans. Plasma Sci. 26, 1556 (1998).
14. U. Czarnetzki, D. Luggenhölscher, H. F. Döbele. Plasma Sources Sci. Technol. 8, 230 (1999).
15. U. Czarnetzki, D. Luggenhölscher, H. F. Döbele. Appl. Phys. A 72, 509 (2001).
16. U. Czarnetzki, G. A. Hebner, D. Luggenhölscher, H. F. Döbele, M. E. Riley. IEEE Trans. Plasma Sci. 27, 70 (1999).
17. V. P. Gavrilenko, H. J. Kim, T. Ikutake et al. Phys. Rev. E 62, 7201 (2000).
18. E. K. Cherkasova, V. P. Gavrilenko, A. I. Zhuzhunashvili. Proceedings Laser Aided Plasma Diagnostics X, Fukuoka, Japan (2001).
19. K. Takizawa, K. Sasaki, K. Kadota. Jpn. J. Appl. Phys. 41, L1285 (2002).
20. T. J. Jiang, M. D. Bowden, B. Visser, G. M. W. Kroesen. Proceedings Frontiers in Low Temperature Plasma Diagnostics V, Villaggio Cardigliano, Italy (2003).
21. O. A. Evsin, E. B. Kupryanova, V. A. Ochkin, S. Yu. Savinov, S. N. Tskhai. Quant. Electr. 25, 278 (1995).
22. L. Oksuz, M. A. Khedr, N. Hershkowitz. Phys. Plasmas 8, 1729 (2001).
23. P. J. Hargis, Jr., K. E. Greenberg, P. A. Miller et al. Rev. Sci. Instrum. 65, 140 (1994).
24. F. Werner, D. Korzec, J. Engemann, Plasma Sources Sci. Technol. 3, 473 (1994).
25. A. Gilardini. Low Energy Electron Collisions in Gases, John Wiley, New York (1972).
26. H. R. Griem. Spectral Line Broadening by Plasmas, Academic Press, New York (1974).