3D micro-fabrication processes: A review

Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators, ICEPT

Volumn , Issue , 2006, Pages 289-298

  Stokes, Chris ^a   Palmer, Paul J ^a  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

Three dimensional micro fabrication

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; FABRICATION; HELIUM; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; OPTICAL DESIGN; RESEARCH LABORATORIES; SENSORS; THREE DIMENSIONAL;

3-D MICROFABRICATION; FABRICATION PROCESSES; MEMS SENSORS; MICRO SCALES; STATE OF THE ARTS; THREE-DIMENSIONAL MICRO-FABRICATION;

TECHNOLOGY;

EID: 51949113046     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (52)

1. S. Rajic, P.G. Datskos and I. Datskou, "Novel ftibrication and simple hybridization of exotic material MEMS," in Proceedings of SPIE: Micromachining and Microfabrication Process Technology V, Santa Clara, CA, USA ed., 3874, J.H. Smith and J.M. Karam Eds. Bellingham, WA: SPIE. pp. 188-194, (1999).
2. M. Weck, S. Fischer and M. Vos, "Fabrication of microcomponents using ultraprecision machine tools," Nanotechnology, pp. 145-148, (1997).
3. MA. Davies, C.J. Evans, S.R. Patterson, R.R. Vohra and B.C. Bergner, "Application of precision diamond machining to the manufacture of micro-photonics components," in Lithographic and Micromachining Techniqnes for Optical Component Fabrication II. Proceedings of the SPIE, pp. 94-108, (2003).
4. S. Dimov, D.T. Pham, A. Ivanov, K. Popov and K. Fansen, "Micromilling strategies: optimization issues," Proceedings of the I MECH E Part B Journal of Engineering Manufacture, 218, pp. 731-736, (2004).
5. L. Uriarte, A. Ivanov, H. Oosterling, L. Staemmler, P.T. Tang and D. Allen, "A comparison between microfabrication technologies for metal tooling," October 2005, (2005).
6. B. Rooks, "The shrinking sizes in micro manufacturing," Assem.Autom., 24, pp. 352, (2004).
7. C. Friedrich, "Precision micromanufacturing processes applied to miniaturization technologies," 2006, (1998).
8. E. Kussul, T. Baidyk, L. Ruiz-Huerta, A. Caballero-Ruiz, G. Velasco and L. Kasatkina, "Development of micromachine tool prototypes for microfactories," J Micromech Microengineering, 12, pp. 795-813, 11/01/. (2002).
9. D. M. Allen, "Microelectrodischarge machining," in Micromachining of Engineering Materials, First ed., J. McGeough Ed. New York: Marcel Dekker, pp. 179-201, (2002).
10. K. Rajurkar and M. Madou, "Processes," in WTEC Panel Report on International Assessment of Research and Development in Micromanufacturing, First ed., K.F. Ehmann, D. Bourrell, M.L. Culpepper, T.J. Hodgson, T.R. Kurfess, M. Madou, K. Rajurkar and R.E. DeVor Eds. Baltimore, Maryland: World Technology Evaltmation Center, pp. 39-63, (2005).
11. K. Egashira aad K. Mizutani, "Micro-drilling of monocrystalline silicon using a cutting tool," Precis Eng, 26, pp. 263-268, (2002).
12. H. Huang, H. Zhang, L. Zhou and H.Y. Zheng, "Ultrasonic vibration assisted electro-discharge machining of microholes in Nitinol," J Micromech Microengineering, 13, pp. 693-700, (2003).
13. K. Takahala and Y.B. Gianchandani, "Batch mode micro-EDM for high-density and high-throughput micromachining," in Proceedings of the 14th IEEE International Conference on Micro Electro Mechanical Systems, 2001 (MEMS 2001), pp. 72-75, (2001).
14. D.T. Pham, S.S. Dimov, S. Bigot, A. Ivanov and K. Popov, "Micro-EDM - recent developments and research issues," J.Mater.Process.Technol. , 149, pp. 50-57, 6/10. (2004).
15. Resonetics, "Review of laer micromachining in contract manufacturing," 2006, 16 January 2003, (2003).
16. H. Haferkamp, A. Ostendorf, H. Becker, S. Czerner and P. Stippler, "Combination of Yb:YAG-disc laser and roll-based powder deposition for the micro-laser sintering," J.Mater.Process. Technol., 149, pp. 623-627, 06/10/. (2004).
17. Resonetics, "Medical devices manufacturing by laser micromachining technology," vol. 2006, 16 January 2003. (2003).
18. D. Kremer and V. Benkirane, "Ultrasonic Micromachining," in Micromachining of Engineering Materials, First ed., J. McGeough Ed. New York: Taylor & Francis, pp. 147-178, (2001).
19. EnvisionTec, "Perfactory Technical Data - Perfactory plus ERM Mini Multi Lens System with Enhanced Resolution Module (ERM)," vol. 2006, 20 October 2004. (2005).
20. A. Bertsch, S. Jiguet, P. Bernhard and P. Renaud, " Microstereolithography: A review," in Materials Research Society Symposium Proceedings on Rapid Prototyping Technologies, pp. 3-15, (2003).
21. FineLine Protoryping, "FineLine Prototyping," vol. 2006, 28 September 2005. (2005).
22. Proform AG, "Proform AG: Rapid Prototyping, Small series, Metal parts," vol. 2006, 20 January 2006. (2006).
23. S. Monneret, "La microstéréolithographie et ses applications," Mecanique Et Industrie, 6, pp. 457-463, 01/01/. (2005).
24. V.K. Varadan, X. Jiang and V.V. Varadan, Microstereolithography and other Fabrication Techniques for 3D MEMS, Chichester, UK: John Wiley & Sons, (2001).
25. V.K. Varadan and V.V. Varadan, "Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems," Smart Mater Struct, 9, pp. 953-973, 12/01/. (2000).
26. R. Knitter and W. Bauer, "Ceramic microfabrication by rapid prototyping process chains," Sadhana-Academy Proceedings in Engineering Sciences, 28, pp. 307-318, Feb-Apr. (2003).
27. Proform AG, "Profoms AG: Technologien - Mikrostereolithographie, " vol. 2006, (2006)
28. K. Ikuta and K. Hirowatari, "Real three dimensional micro fabrication using stereo lithographyand metal molding," in Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, 1993 (MEMS '93), pp. 42-47, (1993).
29. K. Ikuta, T. Ogata, M. Tsuboi and S. Kojima, "Development of mass productive micro stereo lithography (mass-IH process)," in Proceedings of the IEEE Annual International Workshop on Micro Electro Mechanical Systems, 1996 (MEMS '94). pp. 301-306, (1996).
30. S. Maruo, K. Ikuta and T. Ninagawa, "Multi-polymer microstereolithography for hybrid opto-MEMS," in Proceedings of the 14th IEEE International Conference on Micro Electro Mechanical Systems, 2001 (MEMS 2001), pp. 151-154, (2001).
31. S. Zissi, A. Bertsch, S. Ballandras, S. Corbel, J.Y. Jézé quel, C. Belin, D.J. Lougnot and J.C. André, "Limites de la stéréophotolithographie pour des applications microtechniques, " in Troisième Assises Européennes du Prototypage Rapide, (1994),
32. A. Bertsch, S. Zissi, J.Y. Jézéquel, S. Corbel and J.C. André, "Manufacture of multilayers microparts by microstereolithography," in Proceedings of the 3rd France-Japan Congress and 1st Europe-Asia Congress on Mechatronics, pp. 492-495, (1996).
33. V. Loubère, S. Monneret and S. Corbel, " Microstereolithography using a mask-generator display," in Proceedings of the 4th Japan-France Congress and 2nd Asia-Europe Congress on Mechatronics, pp. 160-163, (1998).
34. M. Farsari, F. Claret-Tournier, S. Huang, C.R. Chatwin, D.M. Budgett, P.M. Birch, R.C.D. Young and J.D. Richardson, "A novel high-accuracy microstereolithography method employing an adaptive electro-optic mask," J.Mater.Process.Technol, 107, pp. 167-172, 11/22. (2000).
35. L. Beluze, A. Bertsch and P. Renaud, "Microstereolithography: a new process to build complex 3D objects," vol. 3680, pp. 808-817, (1999).
36. C. Sun, N. Fang, D.M. Wu and X. Zhang, "Projection micro-stereolithography using digital micro-minor dynamic mask," Sensors and Actuators - A - Physical Sensors, 121, pp. 113-121, 05/31/. (2005).
37. S. Maruo and S. Kawata, "Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication," Journal of Microelectromechanical Systems, 7, pp. 411-415, (1998).
38. S. Kawata, H. Sun. T. Tanaka and K. Takada. "Finer features for functional microdevices," Nature, 412, pp. 697-698, 16 August 2001. (2001).
39. N. Fang, C. Sun and X. Zhang, "Diffusion-limited photopolymerization in scanning micro-stereolithography," Applied Physics - Section A - Materials Science and Processing, 79, pp. 1839-1843, 12/01/. (2004).
40. S. Maruo and K. Ikuta, "Submicron stereolithography for the production of freely movable mechanisms by using single-photon polymerization," Sensors and Actuators A: Physical, 100, pp. 70-76, 8/15. (2002).
41. K.F. Ehmann, D. Bourell, M.L. Culpepper, T.J. Hodgson, T.R. Kurfess, M. Madou, K. Rajurkar and R.E. DeVor, International assessment of research and development in micromanufacturing, World Technology Evaluation Center., Baltimore, Maryland, October 2005, (2005).
42. D. Bak, "Marching towards MEMS," Assem.Autom, 24, pp. 24-32, (2004).
43. Microfabrica Inc., "Going beyond silicon MEMS with EFAB technology," (2004).
44. R.A. Said, "Localized electro-deposition (LED): the march toward process development," Nanotechnology, 15, pp. 5649-5659, (2004).
45. C.S. Taylor, P. Cherkas, H. Hampton, J.J. Frantzen, B.O. Shah, W.B. Tiffany, L. Nanis, P. Booker, A. Salahieh and R. Hansen, "'Spatial forming' - A three dimensional printing process," in Proceedings of the IEEE Workshop on Micro Electro Mechanical Systems, 1995 (MEMS '95), pp. 203-208, (1995).
46. A.L. Chait, "High-volume print forming (HVPF) - A new method for manufacturing large volumes of complex metal-ceramic and hybrid components," EoPlex., Redwood City, California, (2005).
47. W.K. Schomburg, R. Abrens, W. Bacher, C. Goll, S. Meinzer and A. Quinte, "AMANDA - low-cost production of microfluidic devices," Sensors and Actuators A: Physical, 70, pp. 153-158, 10/1. (1998).
48. A. Bertsch, H. Lorenz and P. Renaud, "3D microfabrication by combining microstereolithography and thick resist UV lithography," Sensors and Actuators A: Physical, 73, pp. 14-23, 3/9. (1999).
49. Y. Mizukami, D. Rajniak and M. Nishimura, "An integrated micro-electrophoretic chip fabricated using a new stereolithographic process," in Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems, Piscataway, New Jersey: IEEE, pp. 751-756, (2000).
50. K. Ikuta, S. Maruo, T. Fujisawa arid A. Yamada, "Micro concentrator with opto-sense micro reactor for biochemical IC chip family - 3D composite structure and experimental verification," in Proceedings of the Twelfth IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99). pp. 376-381, (1999).
51. K. Ikuta, T. Hasegawa, T. Adachi and S. Maruo, "Fluid drive chips containing multiple pumps and switching valves for biochemical IC family," in Proceedings of the Thirteenth IEEE Annual International Workshop on Micro Electro Mechanical Systems, 2000 (MEMS 2000), pp. 739-744, (2000).
52. K. Ikuta, K. Hirowatari and T. Ogata, "Three dimensional micro integrated fluid systems fabricated by micro stereo lithography," in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '94). pp. 1-6. (1994).