Finer features for functional microdevices

Nature

Volumn 412, Issue 6848, 2001, Pages 697-698

  Kawata, S ^a   Sun, H B ^a   Tanaka, T ^a   Takada, K ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLVED OXYGEN; RESIN;

ARTICLE; DENSITY; DIFFRACTION; ELECTRON BEAM; FORCE; LIGHT ABSORPTION; POLYMERIZATION; PRIORITY JOURNAL; VIBRATION; VISCOSITY;

EID: 0035899361     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/35089130     Document Type: Article

References (12)