Micro concentrator with opto-sense micro reactor for biochemical IC chip family - 3D composite structure and experimental verification

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 376-381

  Ikuta, Koji ^a   Maruo, Shoji ^a   Fujisawa, Tetsuya ^a   Yamada, Akira ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCHEMISTRY; BIOREACTORS; ELECTRONICS PACKAGING; INTEGRATED CIRCUIT MANUFACTURE; MASKS; OPTICAL SENSORS; PHOTOLITHOGRAPHY;

MICRO-CONCENTRATOR CHIPS; MICRO-STEREO LITHOGRAPHY;

MICROPROCESSOR CHIPS;

EID: 0032689741     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746858     Document Type: Conference Paper

References (8)