Novel fabrication and simply hybridization of exotic material MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 188-194

  Rajic, S ^a   Datskos, P G ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED RADIATION; ION BEAMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; MILLING (MACHINING); SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

EXOTIC MATERIALS; HYBRIDIZATION; MICROOPTOELECTROMECHANICAL SYSTEMS;

SEMICONDUCTOR MATERIALS;

EID: 0033333646     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)