Microstereolithography: A review

Materials Research Society Symposium - Proceedings

Volumn 758, Issue , 2003, Pages 3-15

  Bertsch, Arnaud ^a   Jiguet, Sébastien ^a   Bernhard, Paul ^b   Renaud, Philippe ^a  

^a EPFL   (Switzerland)

^b Proform AG   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CERAMIC MATRIX COMPOSITES; COMPONENTS; ELECTRON DEVICE MANUFACTURE; MICROELECTROMECHANICAL DEVICES; RAPID PROTOTYPING; THREE DIMENSIONAL;

MICROENGINEERING DOMAIN; MICROFABRICATION; MICROSTEREOLITHOGRAPHY; THREE DIMENSIONAL PARTS;

LITHOGRAPHY;

EID: 0042466226     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (30)

1. C. W. Hull, US Patent Patent No. 4,575,330 (1986)
2. J. C. André, A. Le Méhauté, and O. De Witte, French Patent Patent No. 84,11,241 (1984).
3. L. Beluze, A. Bertsch, and P. Renaud, presented at the SPIE Symposium on Design, Test and microfabrication of MEMs/MOEMs, Paris, France, 1999.
4. S. Zissi, A. Bertsch, J. Y. Jézéquel, S. Corbel, J. C. André, and D. J. Lougnot, Microsystem Technologies 2 (2), 97 (1996).
5. T. Nakamoto, K. Yamaguchi, P. A. Abraha, and K. Mishima, J. Micromech. Microeng. 6 (2), 240 (1996).
6. A. Bertsch, P. Bernhard, C. Vogt, and P. Renaud, Rapid Prototyping Journal 6 (4), 259 (2000).
7. P. Bernhard, Rapid prototyping report Dec. 1997 (1997).
8. T. Takagi and N. Nakajima, presented at the 4th International Symposium on Micro Machine and Human Science (MHS'93), 1993.
9. K. Ikuta and K. Hirowatari, presented at the 6th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'93), 1993.
10. S. Zissi, A. Bertsch, S. Ballandras, S. Corbel, J. Y. Jézéquel, C. Belin, D. J. Lougnot, and J. C. André, presented at the 3e Assises Européennes du Prototypage Rapide, Paris, France, 1994.
11. X. Zhang, X. N. Jiang, and C. Sun, Micro Electro Mechanical Systems (MEMS) ASME 66, 3 (1998).
12. A. Bertsch, S. Zissi, J. Y. Jézéquel, S. Corbel, and J. C. André, Micro. Tech. 3 (2), 42 (1997).
13. A. Bertsch, S. Zissi, J. Y. Jézéquel, S. Corbel, and J. C. André, presented at the 4èmes assises européennes du prototypage rapide, Paris, France, 1995.
14. V. Loubère, S. Monneret, and S. Corbel, presented at the the 4th Japan-France Congress and 2nd Asia-Europe Congress on Mechatronics, Kitakyushu, Japan, 1998.
15. C. R. Chatwin, M. Farsari, S. Huang, M. I. Heywood, P. M. Birch, R. C. D. Young, and J. L. J. Hornbeck, Applied optics 37 (32), 7514 (1998).
16. L. J. Hornbeck, presented at the Electronic Imaging (EI'97) - Projection displays III, San Jose, California, USA, 1997.
17. S. Maruo, O. Nakamura, and S. Kawata, presented at the SPIE - Optics for Science and New Technology, 1996.
18. S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, Nature 412, 697 (2001).
19. K. Ikuta, S. Maruo, and S. Kojima, presented at the 11th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'98), Heidelberg, Germany, 1998.
20. H. Bohlmann and R. Götzen, presented at the 4th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST'01), Baden-Baden, Germany, 2001.
21. S. Maruo, O. Nakamura, and S. Kawata, Optics Letters 22 (2), 132 (1997).
22. M. Farsari, S. Huang, P. M. Birsch, F. Clarte-Tournier, R. C. D. Young, D. Budgett, C. Bradfield and C. R. Chatwin, optics letters 24 (8), 549 (1999).
23. S. Maruo and K. Ikuta, Applied Physics Letters 76 (19), 2656 (2000).
24. A. Bertsch, H. Lorenz, and P. Renaud, Sensors and Actuators: A 73, 14 (1999).
25. T. Takagi and N. Nakajima, presented at the 7th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'94), Oiso, Japan, 1994.
26. S. Ballandras, M. Calin, S. Zissi, A. Bertsch, J. C. André, and D. Hauden, Sensors and actuators A 62, 741 (1997).
27. T. S. Ji, K. J. Vinoy, and V. K. Varadan, Smart Materials and Structures 10, 1224 (2001).
28. S. Maruo, K. Ikuta, and T. Ninagawa, presented at the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2001), Interlaken, Switzerland, 2001.
29. K. Ikuta, T. Hasegawa, and T. Adachi, presented at the Transducers'01 Eurosensors XV Workshop, Munich, Germany, 2001.
30. K. Ikuta, presented at the International Microprocesses and Nanotechnology Conference, 2000.