Batch mode micro-EDM for high-density and high-throughput micromachining

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 72-75

  Takahata, Ken’ichi ^a   Gianchandani, Yogesh B ^b  

^a PANASONIC CORPORATION   (Japan)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRIC DISCHARGES; MICROELECTRODES; MULTILAYERS; PULSE CIRCUITS; TIMING CIRCUITS;

ELECTRODE ARRAYS; MICRO-ELECTRO-DISCHARGE MACHINING (MICRO-EDM);

MACHINING;

EID: 0035016996     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906481     Document Type: Article

References (0)