Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication

Journal of Microelectromechanical Systems

Volumn 7, Issue 4, 1998, Pages 411-415

  Maruo, Shoji ^a,b   Kawata, Satoshi ^a,c  

^a OSAKA UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Photopolymer; Three dimensional microfabrication; Two photon absorption

Indexed keywords

ENERGY ABSORPTION; MICROMACHINING; MICROSTRUCTURE; PHOTOPOLYMERIZATION; PULSED LASER APPLICATIONS; RESINS;

TWO-PHOTON ABSORPTION PROCESS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032302974     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.735349     Document Type: Article

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