Fabrication of microcomponents using ultraprecision machine tools

Nanotechnology

Volumn 8, Issue 3, 1997, Pages 145-148

  Weck, M ^a   Fischer, S ^a   Vos, M ^a  

^a FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DRILLING; MACHINE TOOLS; MILLING (MACHINING); TURNING;

MICROCOMPONENTS; MICROSTRUCTURED SURFACES;

NANOTECHNOLOGY;

EID: 0031223952     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/8/3/007     Document Type: Article

References (7)

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2. Blackley W and Scattergood R 1991 Ductile-regime machine model for diamond turning of brittle materials Precision Eng. 13 S95-103
3. Klocke F, Weck M, Fisher S, Özmeral H, Schroeter R and Zamel S, Ultrapräzisions bearbeitung und fertigung von mikrokomponenten Industrie Diamanten Rundschau
4. McKeown P A 1987 The role of precision engineering in manufacturing of the future Ann. CIRP 36
5. Moriwaki T and Shamoto E 1991 Ultraprecision diamond turning of stainless steel by applying ultrasonic vibration Ann. CIRP 1
6. Oomen J and Eisses J 1992 Wear of monocrystalline diamond tools during Ultraprecision machining of nonferrous metals Precision Eng. 14
7. Spenrath N 1991 Technologische Aspekte zum feintdrehen von kupferspiegeln Dissertation RWTH Aachen