Multi-polymer microstereolithography for hybrid opto-MEMS

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 151-154

  Maruo, S ^a   Ikuta, K ^a   Ninagawa, T ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MICROOPTICS; OPTICAL WAVEGUIDES; POLYMERS; REFRACTIVE INDEX;

MICROSTEREOLITHOGRAPHY; PHOTOCURABLE POLYMERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035023066     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)