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Sensors and Actuators, A: Physical

Volumn 100, Issue 1, 2002, Pages 70-76

Submicron stereolithography for the production of freely movable mechanisms by using single-photon polymerization

(2) Maruo, Shoji a Ikuta, Koji a

a NAGOYA UNIVERSITY (Japan)

Author keywords

Micro gear; Micro stereolithography; Movable micromechanism; Photopolymer; Three dimensional microfabrication

Indexed keywords

CHEMICAL LASERS; COMPOSITE MICROMECHANICS; DIFFRACTION; LASER BEAMS; LITHOGRAPHY; NONLINEAR OPTICS; PHOTOPOLYMERIZATION; SOLIDIFICATION;

SINGLE PHOTON POLYMERIZATION; STEREOLITHOGRAPHY;

MICROSENSORS;

EID: 0037103906 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(02)00043-2 Document Type: Article

Times cited : (146)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.