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Volumn 24, Issue 1, 2004, Pages 24-32
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Marching towards MEMS
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Author keywords
Batch processing; Monolithic integrated circuits
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Indexed keywords
COST EFFECTIVENESS;
MONOLITHIC INTEGRATED CIRCUITS;
NANOTECHNOLOGY;
PNEUMATIC CONTROL;
PRECISION ENGINEERING;
SEMICONDUCTOR MATERIALS;
SENSORS;
BATCH PROCESSING;
OVERLOAD PROTECTION;
MICROELECTROMECHANICAL DEVICES;
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EID: 1642325124
PISSN: 01445154
EISSN: None
Source Type: Journal
DOI: 10.1108/01445150410517156 Document Type: Review |
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Times cited : (3)
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References (0)
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