Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 739-744

  Ikuta, Koji ^a   Hasegawa, Tadahiro ^a   Adachi, Takao ^a   Maruo, Shoji ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SWITCHES; INTEGRATED CIRCUIT MANUFACTURE; PUMPS; SHAPE MEMORY EFFECT; VALVES (MECHANICAL);

FLUID DRIVE CHIPS;

MICROPROCESSOR CHIPS;

EID: 0033705945     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)