Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry

Review of Scientific Instruments

Volumn 78, Issue 10, 2007, Pages

  Wehrmeister, Jana ^a   Fuß, Achim ^b   Saurenbach, Frank ^b   Berger, Rüdiger ^c   Helm, Mark ^a  

^a UNIVERSITY OF HEIDELBERG   (Germany)

^b Surface Imaging Systems GmbH   (Germany)

^c MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; GOLD; INTERFEROMETRY; REFRACTIVE INDEX; SENSOR ARRAYS; SUBSTRATES;

FABRY-PEROT INTERFEROMETRY; MICROMECHANICAL CANTILEVER SENSOR (MCS); NANOMETER PRECISION;

MICROMECHANICS;

ARTICLE; ATOMIC FORCE MICROSCOPY; EQUIPMENT; EQUIPMENT DESIGN; INFORMATION PROCESSING; INSTRUMENTATION; INTERFEROMETRY; METHODOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

DATA DISPLAY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; INTERFEROMETRY; MICROSCOPY, ATOMIC FORCE; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS;

EID: 36049046115     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2785028     Document Type: Article

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