Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3948-3953

  Gotszalk, T ^a   Radojewski, J ^a   Grabiec, P B ^b   Dumania, P ^b   Shi, F ^c   Hudek, P ^c   Rangelow, I W ^c  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b Institute of Electron Technology   (Poland)

^c UNIVERSITY OF KASSEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000779183     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590443     Document Type: Article

References (18)

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