Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

Nanotechnology

Volumn 16, Issue 1, 2005, Pages 98-102

  Ghatnekar Nilsson, S ^a   Forsen E ^b   Abadal, G ^c   Verd, J ^c   Campabadal, F ^c   Perez Murano F ^c   Esteve, J ^c   Barniol, N ^c   Boisen, A ^b   Montelius, L ^a  

^a LUND UNIVERSITY   (Sweden)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELASTIC MODULI; ELECTRON BEAM LITHOGRAPHY; ELECTROSTATIC ACTUATORS; FABRICATION; FREQUENCY SHIFT KEYING; MICROMACHINING; NATURAL FREQUENCIES; RESONANCE; SIGNAL DETECTION;

CANTILEVER DEFLECTION; DIRECT WRITE LASER (DWL) LITHOGRAPHY; ELECTROSTATIC ACTUATION; MECHANICAL RESONANCE;

RESONATORS;

EID: 19944427727     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/1/020     Document Type: Article

References (16)

1. Marie R, Jensenius H, Thaysen J, Christensen C B and Boisen A 2002 Ultramicroscopy 91 29
2. McKendry R et al 2002 Proc. Natl Acad. Sci. USA 99 9783
3. Pei J, Tian F and Thundat T 2004 Anal. Chem. 76 292
4. Yue M, Lin H, Dedrick D E, Satyanarayana S, Majumdar A, Bedekar A S, Jenkins J W and Sundaram S 2004 J. Microelectromech. Syst. 13 290
5. Fritz J, Baller M K, Lang H P, Rothuizen H, Vettiger P, Meyer E, Guntherodt H-J, Gerber Ch and Gimzewski J K 2000 Science 288 316
6. Rasmussen P A, Thaysen J, Hansen O, Eriksen S C and Boisen A 2003 Ultramicroscopy 97 371
7. Kovacs G T A, Maluf N I and Petersen K E 1998 Proc. IEEE 86 1536
8. Sarid D 1991 Scanning Force Microscopy (Oxford: Oxford University Press)
9. Cleland A N and Roukes M L 1996 Appl. Phys. Lett. 69 2653
10. Yang J, Ono T and Esashi M 2000 Sensors Actuators 82 102
11. Nilsson S G, Sarwe E-L and Montelius L 2003 Appl. Phys. Lett. 83 990
12. Forsén E et al 2004 Nanotechnology 15 628
13. Davies Z J et al 2003 Proc. Transducers '03 (Boston, MA, 2003) p 496
14. Abadal G et al 2001 Nanotechnology 12 100
15. Forsén E, Davis Z J, Dong M, Nilsson S G, Montelius L and Boisen A 2004 Microelectron. Eng. 73/74 487
16. Abadal G, Davis Z J, Borrisé X, Hansen O, Boisen A, Barniol N, Pérez-Murano F and Serra F 2003 Ultramicroscopy 97 127