Direct-view uncooled micro-optomechanical infrared camera

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 100-105

  Mao, M ^a   Perazzo, T ^a   Kwon, O ^a   Majumdar, A ^a   Varesi, J ^a   Norton, P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; DIFFRACTION GRATINGS; FABRY-PEROT INTERFEROMETERS; INFRARED INSTRUMENTS; THERMAL EXPANSION;

FOCAL PLANE ARRAY (FPA); MICRO-OPTOMECHANICAL INFRARED CAMERAS; THERMOMECHANICAL SENSING;

MICROELECTROMECHANICAL DEVICES;

EID: 0032678750     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746778     Document Type: Conference Paper

References (14)