Read-out of micromechanical cantilever sensors by phase shifting interferometry

Applied Physics Letters

Volumn 87, Issue 6, 2005, Pages

  Helm, M ^a   Servant, J J ^b   Saurenbach, F ^c   Berger, R ^d  

^a UNIVERSITY OF HEIDELBERG   (Germany)

^b EO Tech   (France)

^c Surface Imaging Systems GmbH   (Germany)

^d MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURVATURE RADII; LATERAL RESOLUTION; MICROMECHANICAL CANTILEVER SENSORS (MCS);

ERROR ANALYSIS; INTERFEROMETRY; PLASMA APPLICATIONS; SENSORS; THIN FILMS; ULTRAVIOLET RADIATION;

COMPOSITE MICROMECHANICS;

EID: 23944487756     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2008358     Document Type: Article

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