Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Applied Physics Letters

Volumn 87, Issue 4, 2005, Pages

  Forsen, E ^a   Abadal, G ^b   Ghatnekar Nilsson, S ^c   Teva, J ^b   Verd, J ^b   Sandberg, R ^a   Svendsen, W ^a   Perez Murano, F ^b   Esteve, J ^b   Figueras, E ^b   Campabadal, F ^b   Montelius, L ^c   Barniol, N ^b   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^c LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DETECTION; CIRCUITRY; ELECTROSTATIC EXCITATION; SIGNAL AMPLIFICATION;

ADSORPTION; CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; GLYCEROL; NATURAL FREQUENCIES; NETWORKS (CIRCUITS); SENSORS; VACUUM;

MOS DEVICES;

EID: 23744456430     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1999838     Document Type: Article

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