A 2-D microcantilever array for multiplexed biomolecular analysis

Journal of Microelectromechanical Systems

Volumn 13, Issue 2, 2004, Pages 290-299

  Yue, Min ^a   Lin, Henry ^b   Dedrick, Daniel E ^c   Satyanarayana, Srinath ^a   Majumdar, Arunava ^a   Bedekar, Aditya S ^d   Jenkins, Jerry W ^d   Sundaram, Shivshankar ^d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d CFD RESEARCH CORPORATION   (United States)

Author keywords

Lael free; Microcantilever array; Multiplexed biosensing; Surface stress; Whole field optical read out

Indexed keywords

BIOASSAY; BIOMEDICAL ENGINEERING; COATINGS; DNA; GOLD; MICROPROCESSOR CHIPS; MOLECULAR BIOLOGY; OPTICAL SYSTEMS; PROTEINS; SILICON NITRIDE;

MICROCANTILEVER ARRAY; MICROCANTILEVER BEAM; MULTIPLEXED BIOMOLECULAR ANALYSIS; SILICON NITRIDE CANTILEVER;

MICROELECTROMECHANICAL DEVICES;

EID: 1942532727     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.823216     Document Type: Article

References (20)

1. D. J. Duggan, M. Bittner, Y. Chen, Y. Meltzer, and J. Trent, "Expression profiling using cDNA microarrays (review)," Nature Genetics, vol. 21, no. Supplement, pp. 10-14, 1999.
2. R. Berger, E. Delamarche, H. Lang, C. Gerber, J. K. Gimzewski, E. Meyer, and H.-J. Güntherodt, "Surface stress in the self-assembly of alkanethiols on gold," Science, vol. 276, pp. 2021-2024, 1997.
3. J. Fritz, M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H.-J. Güntherodt, C. Gerber, and J. K. Gimzewski, "Translating biomolecular recognition into nanomechanics," Science, vol. 228, pp. 316-318, 2000.
4. G. Wu, H. Ji, K. Hansen, T. Thundat, R. Datar, R. Cote, M. F. Hagan, A. K. Chakraborty, and A. Majumdar, "Origin of nanomechanical cantilever motion generated from biomolecular interactions," in Proc. Nat. Acad. Sci., vol. 98, 2001a, pp. 1560-1564.
5. G. Wu, R. Datar, K. Hansen, T. Thundat, R. Cote, and A. Majumdar, "Bioassay of prostate specific antigen (PSA) using microcantilevers," Nature Biotechnol., vol. 19, pp. 856-860, 2001b.
6. K. Hansen, H. Ji, G. Wu, R. Datar, R. Cote, and A. Majumdar, "Cantilever-based optical deflection assay for discrimination of DNA single-nucleotide mismatches," Analyt. Chem., vol. 73, pp. 1567-1571, 2001.
7. R. Marie, H. Jensenius, J. Thaysen, C. B. Christensen, and A. Boisen, "Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors," Ultramicroscopy, vol. 91, pp. 29-36, 2002.
8. G. Wu, "Nanomechanical Biosensor for High Throughput Genomic and Proteomic Analysis," Ph.D., University of California, Berkeley, California, 2001c.
9. M. F. Hagan, A. Majumdar, and A. K. Chakraborty, "Nanomechanical forces generated by surface grafted DNA," J. Phys. Chem. B, vol. 106, pp. 10 163-10 173, 2002.
10. R. McKendry, J. Y. Zhang, Y. Arntz, T. Strunz, M. Hegner, H. P. Lang, M. K. Baller, U. Certa, E. Meyer, H. J. Guntherodt, and C. Gerber, "Multiple lable-free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array," in Proc. Nat. Acad. Sci., vol. 99, 2002, pp. 9783-9788.
11. Anonymous, CFD-ACE+Theory Manual. Huntsville, AL: CFD Res. Corp., 2002.
12. V.B. Makhijani et al., "Simulation of flow in structurally programmable microfluidic channels," in Tech. Proc. 4th Int. Conf. Modeling and Simulation of Microsystems, S. C. H. Head, M. Laudon, and B. Romanowicz, Eds., Cambridge, MA, 2001, pp. 266-269.
13. G. G. Stoney, "The tension of metallic films deposited by electrolysis," in Proc. Roy. Soc. Lond. A, vol. 82, 1909, p. 172.
14. T. Miyatani and M. Fujihira, "Calibration of surface stress measurements with atomic force microscopy," J. Appl. Phys., vol. 81, no. 11, pp. 7099-7115, 1997.
15. J. R. Barnes, S. J. Stephenson, M. E. Welland, C. Gerber, and J. K. Gimzewski, "Photothermal spectroscopy with femtojoule sensitive using a micromechanical device," Nature, vol. 72, pp. 79-82, 1994.
16. J. Lai, T. Perazzo, Z. Shi, and A. Majumdar, "Optimization and performance of high-resolution micro-optomechanical thermal sensors," Sens. Actuators, vol. 58, pp. 113-119, 1997.
17. L. Kiesewetter, J.-M. Zhang, D. Houdeau, and A. Steckenborn, "Determination of Young's moduli of micromechanical thin films using the resonance method," Sens. Actuators A, vol. 35, pp. 153-159, 1992.
18. Y. Zhao, M. Y. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norto, and J. Kitching, "Optomechanical uncooled infrared imaging system: Design, microfabrication, and performance," J. Microelectromech. Syst., vol. 11, pp. 136-146, 2002.
19. M. Yue, "From Sequence Specific DNA/RNA-Protein Bindings to Nano-Motions, Masters Project Report," University of California, Berkeley, California, 2001.
20. K. Dunphy, "DNA-triggered nano-mechanical sensors, Masters Project Rep.," Univ. California, Berkeley, CA, 2001.