Sequential position readout from arrays of micromechanical cantilever sensors

Applied Physics Letters

Volumn 72, Issue 3, 1998, Pages 383-385

  Lang, H P ^a   Berger, R ^a   Andreoli, C ^a   Brugger, J ^a   Despont, M ^a   Vettiger, P ^a   Gerber, Ch ^a   Gimzewski, J K ^a   Ramseyer, J P ^b   Meyer, E ^b   Guntherodt H J ^b  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001672390     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120749     Document Type: Article

References (20)

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