SU-8 cantilever sensor system with integrated readout

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 111-115

  Johansson, A ^a   Calleja, M ^a   Rasmussen, P A ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Biosensor; Cantilever; Electroplating; Piezoresistive readout; SU 8

Indexed keywords

ARRAYS; ELASTIC MODULI; EPOXY RESINS; PHOTORESISTS; PIEZOELECTRICITY; READOUT SYSTEMS; SURFACE PROPERTIES;

INTEGRATED READOUT; MOLECULAR ADSORPTION; SENSOR ARRAYS; SURFACE STRESS;

SENSORS;

EID: 24944497142     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.025     Document Type: Conference Paper

References (14)

1. N.V. Larvik, M.J. Sepaniak, and P.G. Datskos Cantilever transducers as a platform for chemical and biological sensors Rev. Sci. Instrum. 75 2004 2229 2250
2. J. Fritz, M.K. Baller, H.P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H.-J. Güntherodt, Ch. Gerber, and J.K. Gimzewski Translating biomolecular recognition into nanomechanics Science 288 2000 316 318
3. Y. Arntz, J.D. Seeling, H.P. Lang, J. Zhang, P. Hunziker, J.P. Ramseyer, E. Meyer, M. Hegner, and Ch. Gerber Label-free protein assay based on a nanomechanical cantilever array Nanotechnology 14 2003 86 90
4. M. Alvarez, A. Calle, J. Tamayo, L.M. Lechuga, A. Abad, and A. Montoya Development of nanomechanical biosensors for detection of the pesticide DDT Biosens. Bioelectron. 18 2003 649 653
5. L.A. Pinnaduwage, T. Thundat, A. Gehl, S.D. Wilson, D.L. Hedden, and R.T. Lareau Desorption characteristics of uncoated silicon microcantilever surfaces for explosive and common nonexplosive vapors Ultramicroscopy 100 2004 211 216
6. G. Voskerician, M.S. Shive, R.S. Shawgo, H. von Recum, J.M. Anderson, M.J. Cima, and R. Langer Biocompatibility and biofouling of MEMS drug delivery devices Biomaterials 24 2003 1959 1967
7. X.R. Zhang, and X. Xu Development of a biosensor based on laser-fabricated polymer microcantilevers Appl. Phys. Lett. 85 2004 2423 2425
8. J. Zou, X. Wang, D. Bullen, K. Ryu, C. Liu, and C. Mirkin A mould-and-transfer technology for fabricating scanning probe microscopy probes J. Micromech. Microeng. 14 2004 204 211
9. J. Thaysen, A. Boisen, O. Hansen, and S. Bouwstra Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge Sens. Actuators 83 2002 47 53
10. M. Calleja, P.A. Rasmussen, A. Johansson, and A. Boisen Polymeric mechanical sensors with integrated readout in a micro fluidic system SPIE International Symposium Microtechnologies for the New Millenium Maspalomas, Gran Canaria, Canary Islands 19-21 May 2003
11. M. Nordström, A. Johansson, E. Sánchez Noguerón, and A. Boisen Investigation of the bond strength between the photo-sensitive polymer SU-8 and Au Microelectron. Eng. 78-79 2005 152 157
12. P.A. Rasmussen, J. Thaysen, O. Hansen, S.C. Eriksen, and A. Boisen Optimised cantilever biosensor with piezoresisitve read-out Ultramicroscopy 97 2003 371 376
13. A.G. Hansen, M.W. Mortensen, J.E.T. Andersen, J. Ulstrup, A. Kühle, J. Garnæs, and A. Boisen Stress formation during self-assembly of alkanethiols on differently pre-treated gold surfaces Probe Microsc. 2 2 2001 139 149
14. L. Gammelgaard, P.A. Rasmussen, M. Calleja, A. Boisen, Microfabricated photoplastic cantilever strain sensor with integrated photoplastic/carbon based piezoresistors, Appl. Phys. Lett., in press.