Calibration of surface stress measurements with atomic force microscopy

Journal of Applied Physics

Volumn 81, Issue 11, 1997, Pages 7099-7115

  Miyatani, Tatsuya ^a   Fujihira, Masamichi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001022448     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365306     Document Type: Article

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