메뉴 건너뛰기




Volumn 24, Issue 1-2, 1996, Pages 1-54

Polymer surface modification by plasmas and photons

Author keywords

[No Author keywords available]

Indexed keywords

BIOMATERIALS; CROSSLINKING; LASER ABLATION; MICROELECTRONICS; OXYGEN; PHOTONS; PLASMA APPLICATIONS; POLYMERIZATION; SURFACE TREATMENT; THIN FILMS; ULTRAVIOLET RADIATION; VAPOR DEPOSITION;

EID: 0030143664     PISSN: 01675729     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-5729(96)80003-3     Document Type: Article
Times cited : (1003)

References (201)
  • 153
    • 0043116468 scopus 로고
    • A.D. Birch and J.C. Matthews, Microelectron. Manuf. Test 6 (1983) 20; M.G. Ury, J.C. Matthews and C.H. Wood, in: Optical Microlithography, Ed. H.L. Stover, Proc. SPIE 344 (1983) 241.
    • (1983) Microelectron. Manuf. Test , vol.6 , pp. 20
    • Birch, A.D.1    Matthews, J.C.2
  • 154
    • 0042615620 scopus 로고
    • Ed. H.L. Stover, Proc. SPIE
    • A.D. Birch and J.C. Matthews, Microelectron. Manuf. Test 6 (1983) 20; M.G. Ury, J.C. Matthews and C.H. Wood, in: Optical Microlithography, Ed. H.L. Stover, Proc. SPIE 344 (1983) 241.
    • (1983) Optical Microlithography , vol.344 , pp. 241
    • Ury, M.G.1    Matthews, J.C.2    Wood, C.H.3
  • 158
    • 77956906228 scopus 로고
    • Eds. M. Anpo and T. Matsuura Elsevier, Amsterdam
    • H. Hiraoka, in: Photochemistry on Solid Surfaces, Eds. M. Anpo and T. Matsuura (Elsevier, Amsterdam, 1989) pp. 448-468.
    • (1989) Photochemistry on Solid Surfaces , pp. 448-468
    • Hiraoka, H.1
  • 160
    • 0019637312 scopus 로고
    • H. Hiraoka and J. Pacansky, J. Electrochem. Soc. 128 (1981) 2645; J. Vac. Sci. Technol. 19 (1981) 1132.
    • (1981) J. Vac. Sci. Technol. , vol.19 , pp. 1132
  • 163
    • 0041613672 scopus 로고    scopus 로고
    • US Patent No. 4,187,331; Submicron Lithography, Ed. P.D. Blais, Proc. SPIE 333 (1983) 20
    • W.H.-L. Ma, US Patent No. 4,187,331; Submicron Lithography, Ed. P.D. Blais, Proc. SPIE 333 (1983) 20.
    • Ma, W.H.-L.1
  • 165
    • 0023553818 scopus 로고
    • H. Hiraoka, J. Krishnaswamy and G. Collins, 172nd Meeting of the Electrochem. Soc., Oct. 19, 1987; see also, H. Hiraoka, Microcircuit Eng. 6 (1987) 407.
    • (1987) Microcircuit Eng. , vol.6 , pp. 407
    • Hiraoka, H.1
  • 169
    • 0042615615 scopus 로고    scopus 로고
    • US Patent No. 4,104,070 (1978)
    • H. Moritz and G. Paal, US Patent No. 4,104,070 (1978).
    • Moritz, H.1    Paal, G.2
  • 182
  • 183
    • 0027927176 scopus 로고
    • H. Hiraoka and M. Sendova, Appl. Phys. Lett. 65 (1994) 563; Jpn. J. Appl. Phys. 32 (1993) 6182; Mater. Manuf. Processes 9 (1994) 467.
    • (1994) Appl. Phys. Lett. , vol.65 , pp. 563
    • Hiraoka, H.1    Sendova, M.2
  • 184
    • 0027846930 scopus 로고
    • H. Hiraoka and M. Sendova, Appl. Phys. Lett. 65 (1994) 563; Jpn. J. Appl. Phys. 32 (1993) 6182; Mater. Manuf. Processes 9 (1994) 467.
    • (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 6182
  • 185
    • 0028134467 scopus 로고
    • H. Hiraoka and M. Sendova, Appl. Phys. Lett. 65 (1994) 563; Jpn. J. Appl. Phys. 32 (1993) 6182; Mater. Manuf. Processes 9 (1994) 467.
    • (1994) Mater. Manuf. Processes , vol.9 , pp. 467
  • 195
    • 0023999754 scopus 로고
    • Eds. M. Anpo and T. Matsuura Elsevier, Amsterdam
    • H. Hiraoka, in: Photochemistry in Solid Surfaces, Eds. M. Anpo and T. Matsuura (Elsevier, Amsterdam, 1989); T.J. Chuang, H. Hiraoka and A. Mödi, Appl. Phys. A 45 (1988) 277.
    • (1989) Photochemistry in Solid Surfaces
    • Hiraoka, H.1
  • 196
    • 0023999754 scopus 로고
    • H. Hiraoka, in: Photochemistry in Solid Surfaces, Eds. M. Anpo and T. Matsuura (Elsevier, Amsterdam, 1989); T.J. Chuang, H. Hiraoka and A. Mödi, Appl. Phys. A 45 (1988) 277.
    • (1988) Appl. Phys. A , vol.45 , pp. 277
    • Chuang, T.J.1    Hiraoka, H.2    Mödi, A.3
  • 198
    • 0041683501 scopus 로고
    • Eds. H. Masuhara, F.C. De Schryver, N. Kitamura and N. Tamai North-Holland, Amsterdam
    • R. Srinivasan, in: Microchemistry, Eds. H. Masuhara, F.C. De Schryver, N. Kitamura and N. Tamai (North-Holland, Amsterdam, 1994) p. 137.
    • (1994) Microchemistry , pp. 137
    • Srinivasan, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.