Measurements of material properties using differential capacitive strain sensors

Journal of Microelectromechanical Systems

Volumn 11, Issue 5, 2002, Pages 489-498

  Chu, Larry L ^b   Que, Long ^a,c   Gianchandani, Yogesh B ^a,d,e  

^a IEEE   (United States)

^b University of Wisconsin Madison   (United States)

^c OpticNet Inc   (United States)

^d UNIVERSITY OF WISCONSIN MADISON   (United States)

^e University of Michigan   (United States)

Author keywords

Capacitive measurement; Strain; Temperature coefficient; Young's modulus

Indexed keywords

DIFFERENTIAL CAPACITIVE SENSORS; MATERIAL PROPERTIES MEASUREMENTS; THERMAL EXPANSION COEFFICIENT;

MATERIALS TESTING; MICROMACHINING; NUMERICAL METHODS; SENSITIVITY ANALYSIS; STRAIN MEASUREMENT; TEMPERATURE MEASUREMENT;

MICROSENSORS;

EID: 0036772937     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.803277     Document Type: Article

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