In situ transmission electron microscopy studies enabled by microelectromechanical system technology

Journal of Materials Research

Volumn 20, Issue 7, 2005, Pages 1802-1807

  Zhang, M ^a,b   Olson, E A ^a   Twesten, R D ^a   Wen, J G ^a   Allen, L H ^a   Robertson, I M ^a   Petrov, I ^a  

^a United States of America   (United States)

^b MICRON TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETERS; ELECTRIC CONTACTS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; SILICON NITRIDE; SPECIFIC HEAT;

MICROELECTROMECHANICAL SYSTEM; NANOCALORIMETRY; SAMPLE LOADING MECHANISM;

TRANSMISSION ELECTRON MICROSCOPY;

EID: 29044433598     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0225     Document Type: Article

References (9)

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