A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures

Applied Physics Letters

Volumn 86, Issue 1, 2005, Pages

  Zhu, Yong ^a   Moldovan, N ^a   Espinosa, Horacio D ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CARBON NANOTUBES; ELECTRIC POTENTIAL; INTEGRATED CIRCUITS; PERMITTIVITY; SCANNING ELECTRON MICROSCOPY; SENSORS; TENSILE TESTING; TRANSMISSION ELECTRON MICROSCOPY; X RAY MICROSCOPES;

LOAD SENSORS; NANOWIRES; RESONATING VOLTAGE; SENSOR DISPLACEMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 13544265414     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1844594     Document Type: Article

References (17)

1. M. M. J. Treacy, T. W. Ebbesen, and J. M. Gibson, Nature (London) 381, 678 (1996).
2. P. Poncharal, Z. L. Wang, D. Ugarte, and W. A. de Heer, Science 283, 1513 (1999).
3. M. R. Falvo, G. J. Clary, R. M. Taylor, V. Chi, F. P. Brooks, S. Washburn, and R. Superfine, Nature (London) 389, 582 (1997).
4. E. W. Wong, P. E. Sheehan, and C. M. Lieber, Science 277, 1971 (1997).
5. M. F. Yu, O. Lourie, M. J. Dyer, K. Moloni, T. F. Kelly, and R. S. Ruoff, Science 287, 637 (2000).
6. P. A. Williams, Appl. Phys. Lett. 80, 2574 (2002).
7. M. A. Haque and M. T. A. Saif, Sens. Actuators, A 97-98, 239 (2002).
8. S. Lu, D. A. Dikin, S. Zhang, F. T. Fisher, J. Lee, and R. S. Ruoff, Rev. Sci. Instrum. 75, 2154 (2004).
9. L. Que, J. S. Park, and Y. B. Gianchandani, J. Microelectromech. Syst. 10, 247 (2001).
10. W. C. Tang, T. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators, A 21-23, 328 (1990).
11. H. D. Espinosa, Y. Zhu, and B. Peng, 2002 Annual Meeting of the Society of Experimental Mechanics, Milwaukee, WI, 10-12 June 2002.
12. B. C. Prorok, Y. Zhu, H. D. Espinosa, Z. Guo, Z. P. Bazant, Y. Zhao and B. I. Yakobson, in Encyclopedia of Nanoscience and Nanotechnology, edited by, H. S. Nalwa, (American Scientific, Stevenson Ranch, CA, 2004), Vol. 5, pp. 555-600.
13. Y. Zhu and H. D. Espinosa, J. Microelectromech. Syst. (submitted).
14. J. M. Huang, K. M. Liew, C. H. Wong, S. Rajendran, M. J. Tan, and A. Q. Liu, Sens. Actuators, A 93, 273 (2001).
15. S. D. Senturia, Microsystem Design (Kluwer Academic, Boston, 2002).
16. C. Q. Davis and D. M. Freeman, Opt. Eng. 37, 1299 (1998).
17. W. N. Sharpe, Jr., B. Yuan, and R. Vaidyanathan, Proceedings of the Tenth IEEE International Workshop on MEMS, Nagoya, Japan, 1997.