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Volumn 38 A, Issue 13, 2007, Pages 2340-2348

Fatigue of LIGA Ni micro-electro-mechanical system thin films

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRACK TIPS; FATIGUE CRACK PROPAGATION; METALLOGRAPHIC MICROSTRUCTURE; NICKEL; RECRYSTALLIZATION (METALLURGY); STRESSES; THIN FILMS;

EID: 34548795467     PISSN: 10735623     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11661-007-9246-y     Document Type: Article
Times cited : (18)

References (50)
  • 4
    • 0036120448 scopus 로고    scopus 로고
    • 15th IEEE Int. Conf. on Micro Electro Mechanical Systems, IEEE, Piscataway, NJ
    • H.S. Cho, K.J. Hemker, K. Lian, and J. Goettert: MEMS 2002 IEEE Int. Conf., 15th IEEE Int. Conf. on Micro Electro Mechanical Systems, IEEE, Piscataway, NJ, 2002, pp. 439-42
    • (2002) MEMS 2002 IEEE Int. Conf. , pp. 439-442
    • Cho, H.S.1    Hemker, K.J.2    Lian, K.3    Goettert, J.4
  • 30
    • 34548742423 scopus 로고    scopus 로고
    • Proc. SPIE International Society of Optical Engineers, D.M. Tanner and R. Ramesham, eds
    • Reliability, Testing, and Characterization of MEMS/MOEMS III, Proc. SPIE International Society of Optical Engineers, D.M. Tanner and R. Ramesham, eds., 2003, vol. 5343, pp. 235-43
    • (2003) Reliability, Testing, and Characterization of MEMS/MOEMS III , vol.5343 , pp. 235-243
  • 37
    • 0032296649 scopus 로고    scopus 로고
    • "Mechanical Properties of Thin Polysilicon Films by Means of Probe Microscopy. Materials and Device Characterization"
    • Ioannis C. Knauss W.G. in C.R. Friedrich, and Y. Vladimirsky, eds. in
    • C. Ioannis and W.G. Knauss: In C.R. Friedrich, and Y. Vladimirsky, eds., "Mechanical Properties of Thin Polysilicon Films by Means of Probe Microscopy. Materials and Device Characterization" in Micromachining. Proc. SPIE, 1998, vol. 3512, pp. 66-75
    • (1998) Micromachining. Proc. SPIE , vol.3512 , pp. 66-75
  • 46
  • 47
    • 0004274342 scopus 로고    scopus 로고
    • 2nd ed., Cambridge University Press, UK
    • S. Suresh: Fatigue of Materials, 2nd ed., Cambridge University Press, UK, 1999.
    • (1999) Fatigue of Materials
    • Suresh, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.