Laser-LIGA for serpentine Ni microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 166-171

  Jin, Hengyi ^a   Harvey, Erol C ^a   Hayes, Jason P ^a   Ghantasala, Muralidhar K ^a   Dowling, Andrew ^a   Solomon, Matthew ^a   Davies, Sam T ^b  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Cu seed layer; Excimer laser; Laminar AX dry film; Laser cleaning; Laser confocal microscopy; LIGA like process; Ni micro electroforming

Indexed keywords

CURRENT DENSITY; ELECTROFORMING; ELECTROPLATING; ETCHING; EXCIMER LASERS; LASER ABLATION; MICROSTRUCTURE; PHOTORESISTS; SERPENTINE; SUBSTRATES;

CONFOCAL LASER SCANNING MICROSCOPE;

NICKEL;

EID: 0035772907     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448962     Document Type: Article

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