On the evolution of surface morphology of polysilicon MEMS structures during fatigue

Mechanics of Materials

Volumn 36, Issue 1-2, 2004, Pages 35-44

  Shrotriya, P ^a   Allameh, S M ^a   Soboyejo, W O ^a  

^a Princeton University   (United States)

Author keywords

Fatigue; Linear stability analysis; Polysilicon MEMS; Stress assisted dissolution; Surface reaction; Surface topology evolution

Indexed keywords

DISSOLUTION; FATIGUE OF MATERIALS; FINITE ELEMENT METHOD; MORPHOLOGY; NUCLEATION; POLYSILICON; STRESS ANALYSIS;

LINEAR STABILITY;

MICROELECTROMECHANICAL DEVICES;

EID: 10744220430     PISSN: 01676636     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-6636(03)00029-2     Document Type: Conference Paper

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