Relating mechanical testing and microstructural features of polysilicon thin films

Journal of Materials Research

Volumn 14, Issue 3, 1999, Pages 688-697

  Jayaraman, S ^a   Edwards, R L ^b   Hemker, K J ^a  

^a Johns Hopkins University   (United States)

^b JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; GRAIN SIZE AND SHAPE; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SUBSTRATES; TENSILE PROPERTIES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

POLYSILICON MEMBRANES; POLYSILICON THIN FILMS;

SEMICONDUCTING FILMS;

EID: 0033096744     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0094     Document Type: Article

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