Effect of as-processed and annealed microstructures on the mechanical properties of LIGA Ni MEMS

Materials Research Society Symposium - Proceedings

Volumn 605, Issue , 2000, Pages 197-202

  Xie, Z L ^a   Pan, D ^a   Last, H ^b   Hemker, K J ^a  

^a Johns Hopkins University   (United States)

^b NAVAL SURFACE WARFARE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; MORPHOLOGY; OPTICAL MICROSCOPY; RECRYSTALLIZATION (METALLURGY); TENSILE STRENGTH; TENSILE TESTING; YIELD STRESS;

COLUMNAR MICROSTRUCTURE; OPTICAL CROSS SECTIONAL MICROSCOPY;

NICKEL;

EID: 0034507044     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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