Plasticity length scale in LIGA nickel MEMS structures

Materials Research Society Symposium - Proceedings

Volumn 687, Issue , 2002, Pages 41-46

  Lou, J ^a   Shrotriya, P ^a   Allameh, S ^a   Yao, N ^a   Buchheit, T ^a   Soboyejo, W O ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODEPOSITION; MICROELECTROMECHANICAL DEVICES; PLASTICITY; THICKNESS MEASUREMENT;

COMPOSITE LENGTH SCALE PARAMETER; PLASTICITY LENGTH SCALE PARAMETER; SULFAMATE BATH;

NICKEL;

EID: 0036352756     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. MEMS
2. Effect of As-processed and annealed microstructures on the mechanical properties of LIGA Ni MEMS
3. The deformation of plastically non-homogenous alloys
4. Size dependent hardness of silver single crystals
5. Micro-hardness of annealed and work-hardened copper polycrystals
6. The mechanics of size-dependent indentation
7. A micro-bend test method for measuring the plasticity length scale
8. A phenomenological theory for strain gradient effects in plasticity