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Sensors and Actuators, A: Physical

Volumn 95, Issue 1, 2001, Pages 61-68

Cyclic fatigue and creep of electroformed micromachines

(3) Sparks, Douglas R a Chia, Michael I b Jiang, George Q b

a Integrated Sensing Systems Inc (United States)

b Delphi Corporation (United States)

Author keywords

Creep; Cyclic fatigue; Electroformed nickel; Resonant micromachine; Stiction

Indexed keywords

ACCELEROMETERS; CHEMICAL SENSORS; CREEP; CYCLIC LOADS; FATIGUE OF MATERIALS; PRESSURE; STICTION; VARIABLE FREQUENCY OSCILLATORS;

CYCLIC FATIGUE; ELECTROFORMED MICROMACHINES; ELECTROFORMED NICKEL;

MICROELECTROMECHANICAL DEVICES;

EID: 0035892960 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(01)00716-6 Document Type: Article

Times cited : (29)

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