Measured mechanical properties of LIGA Ni structures

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 59-63

  Cho, H S ^a   Hemker, K J ^a   Lian, K ^b   Goettert, J ^b   Dirras, G ^c  

^a Whiting School of Engineering   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

^c CNRS   (France)

Author keywords

Fatigue; LIGA Ni; Mechanical properties; MEMS

Indexed keywords

CREEP; ELECTROPLATING; FATIGUE OF MATERIALS; LITHOGRAPHY; MICROSTRUCTURE; MOLDING; NICKEL; TENSILE STRENGTH; YIELD STRESS;

HIGH-CYCLE FATIGUE PROPERTIES;

MICROELECTROMECHANICAL DEVICES;

EID: 0037439063     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00314-X     Document Type: Conference Paper

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