Size effects on mechanical properties of polysilicon

American Society of Mechanical Engineers, Materials Division (Publication) MD

Volumn 84, Issue , 1998, Pages 153-155

  Sharpe Jr , William N ^a  

^a Johns Hopkins University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; ELECTROSTATICS; MECHANICAL VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; POLYCRYSTALLINE MATERIALS; STRENGTH OF MATERIALS; TENSILE TESTING;

ELECTROSTATIC TENSILE TESTS;

SILICON;

EID: 0032307395     PISSN: 10716939     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)

1. Brown, S. B., G. C. Johnson, W. Knauss, and W. N. Sharpe, Jr., 1998, "Round Robin Tests of Modulus and Strength of Polysilicon," presented at Microelectromechanical Structures for Materials Research - Symposium N, Materials Research Society and accepted for publication in the proceedings, April, 1998.
2. Gupta, R. K., 1997, "Electrostatic Pull-in Test Structure Design for In-Situ Mechanical Property Measurements of Microelectromechanical Systems (MEMS)," Ph.D. Thesis, Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA.
3. Jayaraman, S., R. L. Edwards, and K. J. Hemker, 1997, "Determination of the Mechanical Properties of Polysilicon thin Films Using Bulge Testing," Material Research Society Proceedings, Vol. 505, eds. R.C. Cammaratta, E. Busso, M. Nastasi and W.C. Oliver, in press.
4. Kahn, H., S. Stemmer, K. Nandakumar, A. H. Heuer, R. L. Mullen, R. Ballarini and M. A. Huff. 1996. "Mechanical Properties of Thick. Surface Micromachined Polysilicon Films," Proceedings of the Ninth IEEE Internatioanl Workshop on Microelectromechanical Systems, San Diego, CA. pp. 343-348.
5. Mullen, R. L., R. Ballarini, Y. Yin, and A. H. Heuer. 1997. "Monte Carlo Simulation of Effective Elastic Constants of Polycrystalline Thin Films," Acta Metallurgica, Vol. 45, No. 6, pp. 2247-2255.