Modeling of fatigue in polysilicon MEMS structures

Journal of Materials Science

Volumn 38, Issue 20, 2003, Pages 4157-4161

  Bhalerao, K ^a   Soboyejo, A B O ^a   Soboyejo, W O ^b  

^a OHIO STATE UNIVERSITY   (United States)

^b Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; FATIGUE OF MATERIALS; NUCLEATION; POLYSILICON; REGRESSION ANALYSIS; SEMICONDUCTOR DEVICE STRUCTURES; SINGLE CRYSTALS; STRESSES;

CRACK NUCLEATION; FATIGUE LIFE PREDICTION; SINGLE CRYSTAL SILICON; STRESS LIFE MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0344153271     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026329606103     Document Type: Article

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