Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 3, 2001, Pages 755-758

  Langford, R M ^a   Huang, Y Z ^a   Lozano Perez, S ^a   Titchmarsh, J M ^a   Petford Long, A K ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMANIPULATORS; MILLING (MACHINING); SILICON WAFERS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAM (FIB) SYSTEMS;

ION BEAMS;

EID: 0035326436     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1371317     Document Type: Conference Paper

References (14)

1. S. Tsuji, K. Tsujimoto, and H. Iwama, IBM J. Res. Dev. 42, 509 (1998).
2. H. Saka, J. Vac. Sci. Technol. B 16, 2522 (1998).
3. M. H. Overwijk, F. C. van den Heuvel, and C. W. T. Bulle-Lieuwma, J. Vac. Sci. Technol. B 11, 2021 (1993).
4. J. F. Walker, Inst. Phys. Conf. Ser. 157, 469 (1997).
5. Y. Sugimoto, M. Taneya, H. Hidaka, and K. Akita, J. Appl. Phys. 68, 2392 (1990).
6. R. J. Young, E. C. G. Kirk, D. A. Williams, and H. Ahmed, Mater. Res. Soc. Symp. Proc. 199, 205 (1990).
7. K. H. Park, Mater. Res. Soc. Symp. Proc. 199, 271 (1990).
8. F. A. Stevie, T. C. Shane, P. M. Kahora, R. Hull, D. Bahnck, V. C. Kannan, and E. Davids, Proceedings of the Symposium on Applied Surface Analysis, Burlington, MA (1995), Vol. 23, p. 61.
9. L. A. Giannuzzi, J. L. Drown, S. R. Brown, R. B. Irwin, and F. A. Stevie, Mater. Res. Soc. Symp. Proc. 480, 19 (1997).
10. R. J. Young, P. D. Carleson, X. Da, T. Hunt, and J. F. Walker, Proceedings from the Twenty-fourth International Symposium for Testing and Failure Analysis, Dallas, TX, 1998 (unpublished).
11. R. M. Langford and A. K. Petford-Long, J. Vac. Sci. Technol. B (accepted).
12. R. M. Langford, C. M. Reeves, J. F. Findlay, C. E. Jeffree, and J. G. Goodall, J. Vac. Sci. Technol. B 18, 100 (2000).
13. A. Yamaguchi, M. Shibata, and T. Hashinaga, J. Vac. Sci. Technol. B 11, 2016 (1993).
14. B. Schmidt, L. Bischoff, and J. Teichert, Sens. Actuators A 61, 369 (1997).