Combined tripod polishing and FIB method for preparing semiconductor plan view specimens

Materials Research Society Symposium - Proceedings

Volumn 480, Issue , 1997, Pages 187-192

  Anderson, Ron ^a   Klepeis, Stanley J ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; POLISHING; SPECIMEN PREPARATION; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAM (FIB) METHOD; SEMICONDUCTOR PLAN VIEW SPECIMENS; TRIPOD POLISHING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031385978     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-480-187     Document Type: Conference Paper

References (4)