메뉴 건너뛰기
Ultramicroscopy
Volumn 87, Issue 3, 2001, Pages 97-104
Surface damage formation during ion-beam thinning of samples for transmission electron microscopy
Author keywords

Cleaving; Focused ion beam; Ion milling; TEM sample preparation
Indexed keywords

AMORPHIZATION; ION BEAMS; SEMICONDUCTING SILICON;
EID: 0035051499     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(00)00096-6     Document Type: Article
Times cited : (220)
References (19)
  • 1
    • 0005124117 scopus 로고    scopus 로고
    • J.C. Bravman, R.M. Anderson, M.L. McDonald (Eds.), Specimen Preparation for Transmission Electron Microscopy of Materials, Vol. 115, Materials Research Society, Pittsburgh, PA, 1988.
  • 2
    • 0005159427 scopus 로고    scopus 로고
    • R. Anderson (Ed.), Specimen Preparation for Transmission Electron Microscopy of Materials II, Vol. 199, Materials Research Society, Pittsburgh, PA, 1990.
  • 3
    • 0005176716 scopus 로고    scopus 로고
    • R. Anderson, B. Tracy, J. Bravman (Eds.), Specimen Preparation for Transmission Electron Microscopy of Materials III, Vol. 254, Materials Research Society, Pittsburgh, PA, 1992.
  • 4
    • 0005120467 scopus 로고    scopus 로고
    • R.M. Anderson, S.D. Walck (Eds.), Specimen Preparation for Transmission Electron Microscopy of Materials IV, Vol. 480, Materials Research Society, Pittsburgh, PA, 1997.
  • 7
    • 0005219067 scopus 로고    scopus 로고
    • S.D. Walck, J.P. McCaffrey, in: R.M. Anderson, S.D.Walek (Eds.),Specimen Preparation for Transmission Electron Microscopy of Materials IV, Vol. 480, Materials Research Society, Pittsburgh, PA, 1997, p. 149.
  • 11
    • 0005221761 scopus 로고    scopus 로고
    • J.F. Zeigler, SRIM (Stopping and Range of Ions in Matter), IBM-Research, 28-0, Yorktown, NY 10598, http://www.research.ibm.com/ionbeams.
  • 15
    • 0005123897 scopus 로고    scopus 로고
    • J.F. Walker, R.F. Broom, Institute of Physics Conference Series, Vol. 157, IOP Publishing Ltd., Amsterdam, 1997, p. 473.
  • 16
    • 0005123689 scopus 로고    scopus 로고
    • A.J. Mardinly, Institute of Physics Conference Series, Vol. 164, IOP Publishing Ltd., Amsterdam, 1999, p. 575.
  • 17
    • 0005123690 scopus 로고    scopus 로고
    • P.H. Albarède, H.J. Lezec, Electron Microscopy 1998, Symposium HH, Vol. III, 1998, p. 431.
  • 18
    • 0005124120 scopus 로고    scopus 로고
    • H. Bender, Institute of Physics Conference Series Vol. 164, IOP Publishing Ltd., Amsterdam,1999, p. 593.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.