A method for multidirectional TEM observation of a specific site at atomic resolution

Journal of Electron Microscopy

Volumn 53, Issue 6, 2004, Pages 583-588

  Kamino, Takeo ^a   Yaguchi, Toshie ^a   Konno, Mitsuru ^a   Ohnishi, Tsuyoshi ^b   Ishitani, Tohru ^b  

^a HITACHI LTD   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

Crystal lattice fringe; FIB micro sampling technique; Focused ion beam; High resolution transmission electron microscopy; Si single crystal; Three dimensional structure characterisation

Indexed keywords

ARTICLE; INSTRUMENTATION; LABORATORY DIAGNOSIS; METHODOLOGY; THREE DIMENSIONAL IMAGING; TRANSMISSION ELECTRON MICROSCOPY;

IMAGING, THREE-DIMENSIONAL; MICROSCOPY, ELECTRON, TRANSMISSION; SPECIMEN HANDLING;

ATOMS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL LATTICES; FOCUSED ION BEAMS; SILICON WAFERS; SINGLE CRYSTALS;

CRYSTAL LATTICE FRINGES; FOCUSED ION BEAM MICRO-SAMPLING TECHNIQUE; FOCUSED IONS BEAMS; HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MICRO SAMPLINGS; SAMPLING TECHNIQUE; SI SINGLE CRYSTALS; STRUCTURE CHARACTERIZATION; THREE-DIMENSIONAL STRUCTURE; THREE-DIMENSIONAL STRUCTURE CHARACTERIZATION;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 13444269537     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/dfh089     Document Type: Article

References (8)

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6. th Int. Symp. for Testing and Failure Analysis: 282-287.
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8. Ishitani T, Umemura K, Yaguchi T, Kamino T, and Ohnishi T (2004) Improvement in performance of focused ion beam cross-sectioning: Aspects of ion-sample interaction. J. of Electron Microscopy: (To be published).