메뉴 건너뛰기




Volumn 218, Issue 2, 2005, Pages 115-124

Crystallographic analysis of thin specimens

Author keywords

Copper gold alloy; EBSD; Focused ion beam; Lift out specimen; Orientation mapping; Sample thickness

Indexed keywords

BACKSCATTERING; BINARY ALLOYS; COPPER ALLOYS; FOCUSED ION BEAMS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; QUALITY CONTROL; SIGNAL TO NOISE RATIO;

EID: 18444385680     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2005.01475.x     Document Type: Article
Times cited : (11)

References (32)
  • 2
    • 1542349278 scopus 로고    scopus 로고
    • Progressive steps in the development of electron backscatter diffraction and orientation imaging microscopy
    • Dingley, D.J. (2004) Progressive steps in the development of electron backscatter diffraction and orientation imaging microscopy. J. Microsc. 213, 214-224.
    • (2004) J. Microsc. , vol.213 , pp. 214-224
    • Dingley, D.J.1
  • 3
    • 0037666434 scopus 로고    scopus 로고
    • Advantages and disadvantages of TEM sample preparation using the FIB technique
    • Engelmann, H.J. (2003) Advantages and disadvantages of TEM sample preparation using the FIB technique. Praktische Metallographie, 40, 163-174.
    • (2003) Praktische Metallographie , vol.40 , pp. 163-174
    • Engelmann, H.J.1
  • 4
    • 0038035241 scopus 로고    scopus 로고
    • TEM and EBSD comparative studies of oxide-carbide composites
    • Faryna, M. (2003) TEM and EBSD comparative studies of oxide-carbide composites. Mater. Chem. Physics, 81, 301-304.
    • (2003) Mater. Chem. Physics , vol.81 , pp. 301-304
    • Faryna, M.1
  • 5
    • 0031170838 scopus 로고    scopus 로고
    • Recent advances in the application of orientation imaging
    • Field, D.P. (1997) Recent advances in the application of orientation imaging. Ultramicroscopy, 67, 1-9.
    • (1997) Ultramicroscopy , vol.67 , pp. 1-9
    • Field, D.P.1
  • 7
    • 0032970357 scopus 로고    scopus 로고
    • A review of focused ion beam milling techniques for TEM specimen preparation
    • Giannuzzi, L.A. & Stevie, F.A. (1999) A review of focused ion beam milling techniques for TEM specimen preparation. Micron, 30, 197-204.
    • (1999) Micron , vol.30 , pp. 197-204
    • Giannuzzi, L.A.1    Stevie, F.A.2
  • 8
    • 0035880592 scopus 로고    scopus 로고
    • Review: Grain and subgrain characterization by electron backscatter diffraction
    • Humphreys, F.J. (2001) Review: Grain and subgrain characterization by electron backscatter diffraction. J. Mater. Sci. 36, 3833-3854.
    • (2001) J. Mater. Sci. , vol.36 , pp. 3833-3854
    • Humphreys, F.J.1
  • 9
    • 0031171333 scopus 로고    scopus 로고
    • Resolution and sensitivity of electron backscattered diffraction in a cold field emission gun SEM
    • Isabell, T.C. & Dravid, V.P. (1997) Resolution and sensitivity of electron backscattered diffraction in a cold field emission gun SEM. Ultramicroscopy, 67, 59-68.
    • (1997) Ultramicroscopy , vol.67 , pp. 59-68
    • Isabell, T.C.1    Dravid, V.P.2
  • 10
    • 17944391150 scopus 로고    scopus 로고
    • Specimen preparation for electron backscatter diffraction - Part 1: Metals
    • Katrakova, D. & Mucklich, F. (2001) Specimen preparation for electron backscatter diffraction - Part 1: metals. Praktische Metallographie, 38, 547-565.
    • (2001) Praktische Metallographie , vol.38 , pp. 547-565
    • Katrakova, D.1    Mucklich, F.2
  • 12
    • 0032971708 scopus 로고    scopus 로고
    • Dual-column (FIB-SEM) wafer applications
    • Krueger, R. (1999) Dual-column (FIB-SEM) wafer applications. Micron. 30, 221-226.
    • (1999) Micron. , vol.30 , pp. 221-226
    • Krueger, R.1
  • 13
    • 0032049418 scopus 로고    scopus 로고
    • Application of focused ion beam milling to cross sectional TEM specimen preparation of industrial materials including heterointerfaces
    • Kuroda, K., Takahashi, M., Kato, T., Saka, H. & Tsuji, S. (1998) Application of focused ion beam milling to cross sectional TEM specimen preparation of industrial materials including heterointerfaces. Thin Solid Films, 319, 92-96.
    • (1998) Thin Solid Films , vol.319 , pp. 92-96
    • Kuroda, K.1    Takahashi, M.2    Kato, T.3    Saka, H.4    Tsuji, S.5
  • 15
    • 0000882045 scopus 로고
    • Focused ion beam technology and applications. Critical review
    • Melngailis, J. (1987) Focused ion beam technology and applications. Critical review. J. Vacuum Sci. Technol. B, 5, 4069-4095.
    • (1987) J. Vacuum Sci. Technol. B , vol.5 , pp. 4069-4095
    • Melngailis, J.1
  • 16
    • 33748865049 scopus 로고
    • Electron backscattering from thin films
    • Niedrig, H. (1982) Electron backscattering from thin films. J. Appl. Physics, 53, R15-R48.
    • (1982) J. Appl. Physics , vol.53
    • Niedrig, H.1
  • 17
    • 0033007641 scopus 로고    scopus 로고
    • Applications of focused ion beam microscopy to materials science specimens
    • Phaneuf, M.W. (1999) Applications of focused ion beam microscopy to materials science specimens. Micron, 30, 277-288.
    • (1999) Micron , vol.30 , pp. 277-288
    • Phaneuf, M.W.1
  • 18
    • 0037290562 scopus 로고    scopus 로고
    • EBSD studies on wear-induced subsurface regions in LIGA nickel
    • Prasad, S.V., Michael, J.R. & Christenson, T.R. (2003) EBSD studies on wear-induced subsurface regions in LIGA nickel. Scripta Mater. 48, 255-260.
    • (2003) Scripta Mater , vol.48 , pp. 255-260
    • Prasad, S.V.1    Michael, J.R.2    Christenson, T.R.3
  • 19
    • 0033390424 scopus 로고    scopus 로고
    • The application of electron backscatter diffraction and orientation contrast imaging in the SEM to textural problems in rocks
    • Prior, D.J., Boyle, A.P., Brenker, F., et al. (1999) The application of electron backscatter diffraction and orientation contrast imaging in the SEM to textural problems in rocks. Am. Mineralogist, 84, 1741-1759.
    • (1999) Am. Mineralogist , vol.84 , pp. 1741-1759
    • Prior, D.J.1    Boyle, A.P.2    Brenker, F.3
  • 21
    • 0035396298 scopus 로고    scopus 로고
    • A review of focused ion beam applications in microsystem technology
    • Reyntjens, S. & Puers, R. (2001) A review of focused ion beam applications in microsystem technology. J. Micromechanics Microengineering, 11, 287-300.
    • (2001) J. Micromechanics Microengineering , vol.11 , pp. 287-300
    • Reyntjens, S.1    Puers, R.2
  • 22
    • 0030987694 scopus 로고    scopus 로고
    • Automated crystal lattice orientation mapping using a computer control SEM
    • Schwarzer, R.A. (1997) Automated crystal lattice orientation mapping using a computer control SEM. Micron, 28, 249-265.
    • (1997) Micron , vol.28 , pp. 249-265
    • Schwarzer, R.A.1
  • 23
    • 85169180284 scopus 로고    scopus 로고
    • Electron backscatter diffraction of metals using a dual beam SEM/FIB
    • Rolston Gordon Communications. Bookham, U.K.
    • Sivel, V.G.M., Alkemade, P.F.A. & Zandbergen, H.W. (2003) Electron backscatter diffraction of metals using a dual beam SEM/FIB. Microscopy Microanalysis, Directory 2003. Rolston Gordon Communications. Bookham, U.K. p. 6.
    • (2003) Microscopy Microanalysis, Directory 2003 , pp. 6
    • Sivel, V.G.M.1    Alkemade, P.F.A.2    Zandbergen, H.W.3
  • 25
    • 0036094498 scopus 로고    scopus 로고
    • Improving the quality of electron backscatter diffraction (EBSD) patterns from nanoparticles
    • Small, J.A., Michael, J.R. & Bright, D.S. (2002) Improving the quality of electron backscatter diffraction (EBSD) patterns from nanoparticles. J. Microsc. 206, 170-178.
    • (2002) J. Microsc. , vol.206 , pp. 170-178
    • Small, J.A.1    Michael, J.R.2    Bright, D.S.3
  • 26
    • 0019045114 scopus 로고
    • An empirical study of electron backscattering from thin films
    • Sogard, M.R. (1980) An empirical study of electron backscattering from thin films. J. Appl. Physics, 51, 4417-4425.
    • (1980) J. Appl. Physics , vol.51 , pp. 4417-4425
    • Sogard, M.R.1
  • 27
    • 0035331822 scopus 로고    scopus 로고
    • Application of focused ion beam lift-out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis
    • Stevie, F.A., Vartuli, C.B., Giannuzzi, L.A., et al. (2001) Application of focused ion beam lift-out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis. Surface Interface Anal. 31, 345-351.
    • (2001) Surface Interface Anal. , vol.31 , pp. 345-351
    • Stevie, F.A.1    Vartuli, C.B.2    Giannuzzi, L.A.3
  • 28
    • 18044369325 scopus 로고    scopus 로고
    • Electron backscattered diffraction patterns from cooled gallium nitride thin film
    • Sweeney, F., Trager-Cowan, C., Hastie, J., et al. (2001) Electron backscattered diffraction patterns from cooled gallium nitride thin film. Physica Stat. Solidi (B), 228, 533-536.
    • (2001) Physica Stat. Solidi (B) , vol.228 , pp. 533-536
    • Sweeney, F.1    Trager-Cowan, C.2    Hastie, J.3
  • 29
    • 0036097323 scopus 로고    scopus 로고
    • Is fast mapping good mapping? a review of the benefits of high-speed orientation mapping using electron backscatter diffraction
    • Trimby, P., Day, A., Mehnert, K. & Schmidt, N.H. (2001) Is fast mapping good mapping? A review of the benefits of high-speed orientation mapping using electron backscatter diffraction. J. Microsc. 205, 259-269.
    • (2001) J. Microsc. , vol.205 , pp. 259-269
    • Trimby, P.1    Day, A.2    Mehnert, K.3    Schmidt, N.H.4
  • 30
    • 0030775904 scopus 로고    scopus 로고
    • Electron diffraction based techniques in scanning electron microscopy of bulk materials
    • Wilkinson, A.J. & Hirsch, P.B. (1997) Electron diffraction based techniques in scanning electron microscopy of bulk materials. Micron, 28, 179-308.
    • (1997) Micron , vol.28 , pp. 179-308
    • Wilkinson, A.J.1    Hirsch, P.B.2
  • 31
    • 0035904889 scopus 로고    scopus 로고
    • Determining phase volume fraction in steels by electron backscattered diffraction
    • Wilson, A.W., Madison, J.D. & Spanos, G. (2001) Determining phase volume fraction in steels by electron backscattered diffraction. Scripta Mater. 45, 1335-1340.
    • (2001) Scripta Mater. , vol.45 , pp. 1335-1340
    • Wilson, A.W.1    Madison, J.D.2    Spanos, G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.