Inelastic electron scattering and energy-selective negative ion reactions in molecular films on silicon surfaces

Applied Surface Science

Volumn 253, Issue 16, 2007, Pages 6646-6656

  Lane, Chirstopher D ^a   Orlando, Thomas M ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electron solid interactions; Electron stimulated desorption; Growth; Plasma processing; Silicon

Indexed keywords

ELECTRON SCATTERING; EXCITED STATES; GROWTH (MATERIALS); MOLECULAR INTERACTIONS; PLASMA APPLICATIONS; SILICON; SURFACE CHEMISTRY; SURFACE REACTIONS;

ELECTRON SOLID INTERACTIONS; ELECTRON STIMULATED DESORPTION; MOLECULAR FILMS;

NEGATIVE IONS;

EID: 34248374269     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.002     Document Type: Article

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