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Volumn 10, Issue 2, 2001, Pages 311-317
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Plasma chemistry and surface processes of negative ions
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL REACTIONS;
ELECTRONS;
GROUND STATE;
IONS;
MOLECULES;
NEGATIVE IONS;
SURFACES;
ATTACHMENT CROSS SECTIONS;
DISSOCIATIVE ELECTRON ATTACHMENT;
PLASMA CHEMISTRY;
SHEATH COLLISIONS;
PLASMA SHEATHS;
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EID: 0035332335
PISSN: 09630252
EISSN: None
Source Type: Journal
DOI: 10.1088/0963-0252/10/2/321 Document Type: Article |
Times cited : (59)
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References (29)
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