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Volumn 10, Issue 2, 2001, Pages 311-317

Plasma chemistry and surface processes of negative ions

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; ELECTRONS; GROUND STATE; IONS; MOLECULES; NEGATIVE IONS; SURFACES;

EID: 0035332335     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/10/2/321     Document Type: Article
Times cited : (59)

References (29)
  • 10
    • 0003979397 scopus 로고
    • Plasma chemistry of fluorocarbon RF discharges used for dry etching
    • PhD Thesis Eindhoven University of Technology, The Netherlands
    • (1991)
    • Haverlag, M.1
  • 25
    • 4243668376 scopus 로고
    • High gas efficiency hydrogen negative ion sources
    • PhD Thesis University of Amsterdam, The Netherlands
    • (1992)
    • Heeren, R.M.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.