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Volumn 11, Issue 1, 2002, Pages 69-76

Langmuir probe and mass spectrometric measurements in inductively coupled CF4 plasmas

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRODES; ELECTRON ENERGY LEVELS; FLUOROCARBONS; ION BOMBARDMENT; IONIZATION; MASS SPECTROMETRY; MAXWELL EQUATIONS; TEMPERATURE;

EID: 0036465272     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/11/1/309     Document Type: Article
Times cited : (33)

References (58)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.