Behaviors of electron and negative-ion densities in low-pressure high-density inductively coupled plasmas of SF6, NF3, CF4, and C4F8 gases diluted with Ar

Thin Solid Films

Volumn 407, Issue 1-2, 2002, Pages 198-203

  Kono, Akihiro ^a   Konishi, Masahito ^a   Kato, Kenji ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Fluorides; Glow discharge; Negative ion; Photodetachment

Indexed keywords

CARRIER CONCENTRATION; FLUORINE COMPOUNDS; GASES; GLOW DISCHARGES; MIXTURES; NEGATIVE IONS; PHOTODISSOCIATION; PLASMA DENSITY;

PHOTODETACHMENT;

INDUCTIVELY COUPLED PLASMA;

EID: 0037155421     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00038-X     Document Type: Conference Paper

References (17)