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Applied Surface Science

Volumn 192, Issue 1-4, 2002, Pages 309-326

Electron interactions with plasma processing gases: Present status and future needs

(2) Christophorou, Loucas G a,b Olthoff, James K a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b BIOMEDICAL RESEARCH FOUNDATION (Greece)

Author keywords

Cross sections; Data needs; Database; Electron interactions; Plasma processing gases; Transport coefficients

Indexed keywords

DATABASE SYSTEMS; ELECTRON TRANSITIONS; ELECTRONS; ENERGY DISSIPATION; GROUND STATE; INTERFACES (MATERIALS); PLASMA THEORY; TRANSIENTS;

ELECTRON INTERACTIONS; PLASMA PROCESSING GASES;

BEAM PLASMA INTERACTIONS;

EID: 0037198333 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(02)00033-8 Document Type: Conference Paper

Times cited : (62)

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