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A gentle temperature ramp is required to prevent void formation during the solid state reaction as described in: Foggiato, J, Yoo, W. S. Semicond. Manuf. 2005, 42-46
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A gentle temperature ramp is required to prevent void formation during the solid state reaction as described in: Foggiato, J.; Yoo, W. S. Semicond. Manuf. 2005, 42-46.
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Spectra taken with 5 kV primary electron energy to keep the scattering as small as possible and to simultaneously be able to detect Ni and Si. Analysis at 15 kV were performed as well to search for other species.
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Spectra taken with 5 kV primary electron energy to keep the scattering volume as small as possible and to simultaneously be able to detect Ni and Si. Analysis at 15 kV were performed as well to search for other species.
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