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Volumn 6, Issue 12, 2006, Pages 2660-2666

Silicon-nanowire transistors with intruded nickel-suicide contacts

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CRYSTAL GROWTH; CURRENT DENSITY; NANOSTRUCTURED MATERIALS; NICKEL COMPOUNDS; SILICON;

EID: 33846389740     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl0613858     Document Type: Article
Times cited : (238)

References (41)
  • 4
    • 2642558550 scopus 로고    scopus 로고
    • Seidel, R.; Graham, A. P.; Unger, E.; B.; Duesberg, G. S.; Liebau, M.; Steinhoegl, W.; Kreupl, F.; Hoenlein, W.; Pompe, W. Nano Lett. 2004, 4, 831-834.
    • Seidel, R.; Graham, A. P.; Unger, E.; B.; Duesberg, G. S.; Liebau, M.; Steinhoegl, W.; Kreupl, F.; Hoenlein, W.; Pompe, W. Nano Lett. 2004, 4, 831-834.
  • 15
    • 33846347900 scopus 로고    scopus 로고
    • See Supporting Information
    • See Supporting Information
  • 18
    • 33846365216 scopus 로고    scopus 로고
    • A gentle temperature ramp is required to prevent void formation during the solid state reaction as described in: Foggiato, J, Yoo, W. S. Semicond. Manuf. 2005, 42-46
    • A gentle temperature ramp is required to prevent void formation during the solid state reaction as described in: Foggiato, J.; Yoo, W. S. Semicond. Manuf. 2005, 42-46.
  • 20
    • 33846381948 scopus 로고    scopus 로고
    • Spectra taken with 5 kV primary electron energy to keep the scattering as small as possible and to simultaneously be able to detect Ni and Si. Analysis at 15 kV were performed as well to search for other species.
    • Spectra taken with 5 kV primary electron energy to keep the scattering volume as small as possible and to simultaneously be able to detect Ni and Si. Analysis at 15 kV were performed as well to search for other species.
  • 21
    • 33846354142 scopus 로고    scopus 로고
    • 3.
    • 3.
  • 40
    • 33846364210 scopus 로고    scopus 로고
    • ds, the curve starts to saturate without entering into a linear region.
    • ds, the curve starts to saturate without entering into a linear region.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.