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Volumn 87, Issue 26, 2005, Pages 1-3

Effective Schottky barrier lowering in silicon-on-insulator Schottky-barrier metal-oxide-semiconductor field-effect transistors using dopant segregation

Author keywords

[No Author keywords available]

Indexed keywords

DOPANT SEGREGATION; SCHOTTKY BARRIER LOWERING; SILICON-ON-INSULATOR; SILICON-ON-INSULATOR SCHOTTKY-BARRIER;

EID: 29744445306     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2150581     Document Type: Article
Times cited : (85)

References (18)
  • 7
    • 29744445485 scopus 로고    scopus 로고
    • While NiSi is not the ideal silicide due to large Schottky barriers for electrons and holes, it is a well-established and widely used material and serves here to demonstrate the performance improvements possible with the present approach.
    • While NiSi is not the ideal silicide due to large Schottky barriers for electrons and holes, it is a well-established and widely used material and serves here to demonstrate the performance improvements possible with the present approach.
  • 12
    • 29744431911 scopus 로고    scopus 로고
    • It is important to note, however, that in a real device the silicidation occurs in the lateral direction, and hence steeper profiles consistent with the ambipolar behavior of the experimental devices can be expected.
    • It is important to note, however, that in a real device the silicidation occurs in the lateral direction, and hence steeper profiles consistent with the ambipolar behavior of the experimental devices can be expected.
  • 18
    • 84858528975 scopus 로고    scopus 로고
    • eff depends on the chosen value to which T (E) has dropped.
    • eff depends on the chosen value to which T (E) has dropped.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.